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Synthesis and hydrogen gas sensing properties of ZnO wirelike thin films

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8 Author(s)
Hung, Nguyen Le ; Department of Materials Science and Engineering, Chungnam National University, Daeduk Science Town, Daejeon 305-764, Republic of Korea ; Eunseong Ahn ; Park, Seongyong ; Hooncheol Jung
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The authors investigated the hydrogen gas sensing properties of the ZnO wirelike films synthesized by two consecutive steps: thermal oxidation of sputtered Zn metallic films in dry air. Structural characterization revealed that the authors synthesized polycrystalline wurtzite ZnO films of a wirelike structure with a width of less than 100 nm and a length of several micrometers, possibly consisting of a chain of ZnO nanocrystallites with a mean granular size of 15 nm. It was found from the gas sensing measurements that the ZnO wirelike films exhibited a maximum sensitivity, defined as a ratio of the change in conductance upon exposure to H2 gas in dry air over the conductance in dry air, ΔG/Ga, of 283% to 200 ppm H2 gas at a temperature of 200 °C, indicating quite a possibility of much reduction in the operating temperature of the ZnO-based H2 gas sensors. The ZnO wirelike film sensors showed a fast response to hydrogen gas in comparison with conventional ZnO films. These results suggest that the ZnO wirelike films can be used as the gas sensing materials for low-cost and high-performance gas sensors.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:27 ,  Issue: 6 )