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The characteristic of square superlattice pattern is analyzed by the methods of image processing and image analyzing in dielectric barrier discharge system. The square superlattice pattern consists of large and small spots square sublattice structures. Various square superlattice patterns are performed and investigated. The D/d (the ratio of large spot's diameter to the small ones) and the DeltaG (the difference of the gray value between the large spot and the small one) are measured. It is found that the D/d of square superlattice patterns decreases when the driven voltage increases, and the value at the rim of the boundary is larger than that at the center of discharge area when it forms at the highest formation voltage. The DeltaG of the spots are also measured when the driving frequency changes.