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Mass Sensor Based on Thin Film Bulk Acoustic Resonator

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1 Author(s)
Biyan Wu ; Comput. & Inf. Eng. Coll., Zhejiang Gongshang Univ., Hangzhou, China

A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608 MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor' SI land Q factor are evaluated.

Published in:

Biomedical Engineering and Informatics, 2009. BMEI '09. 2nd International Conference on

Date of Conference:

17-19 Oct. 2009