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RFID MEMS Sensor Concept Based on Intermodulation Distortion

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2 Author(s)
Viikari, V. ; VTT Tech. Res. Centre, Espoo, Finland ; Seppa, H.

This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

Published in:

Sensors Journal, IEEE  (Volume:9 ,  Issue: 12 )