Mach-Zehnder interferometric optical switch using MEMS phase shifter

We propose a novel type Mach-Zehnder interferometric optical switching device using micro-electro mechanical systems (MEMS) as a phase shifter. As the analytical result, the amount of stretch length is 70 nm at the applied voltage of 60 V per one phase shifter. The pi-shift is achieved using cascade connections of 4-7 shifters.