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Modelling of RF glow discharges by direct numerical procedure of the Boltzmann equation

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2 Author(s)
Nakano, N. ; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan ; Makabe, T.

Summary form only given. In our previous papers, we performed a direct numerical procedure (DNP) of the Boltzmann equation with an algorithm without any expansion of the velocity distribution in spatial homogeneity, in order to study radio frequency (RF) electron transport. We further developed and applied the DNP to the modeling of an RF glow discharge with space and time variation of the electron velocity distribution. It has a great advantage in that the nonequilibrium characteristics of transport electrons can be exactly expressed without statistical error. Only collision cross section of the electron with the molecular are required for calculation without swarm parameters as for electrons, when the governing equation system is numerically simulated. The boundary condition more appropriate both for the electrode surfaces will be introduced, since the velocity (energy) distribution function of electrons between electrodes and on the surface are direct obtained from the series of calculations. Capacitively coupled parallel plate discharge with 20 mm spacing is considered in the present modeling in order to simplify the model and to compare the plasma structure with our previous result using relaxation continuum model. Non reactive Ar with simple cross sections is employed as the source gas.

Published in:

Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on

Date of Conference:

5-8 June 1995