Skip to Main Content
A novel silicon micromachined high-Q cavity resonator at 60 GHz is presented in this paper. The concept of the high-Q resonator is introduced. The novel realization of the cavity resonator is demonstrated through silicon micromachining techniques. Full wave simulations are conducted to verify the propagation mode and the resonant frequency. The resonant frequency of the cavity resonator can be tuned by changing the length of a planar stub shunted to a current probe in the cavity. Experimental results validate the simulation and show great Q factors which are over 320 at the resonances for the WPAN applications.