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Investigation of phase transition in germanium-silicate glasses formed as the result of oxidation of Ge-doped polycrystalline silicon

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2 Author(s)
Kovalevsky, A.A. ; Belarusian state Univ. of Inf. & Radioelectron., Minsk, Belarus ; Strogova, A.S.

The process of formation and properties of Ge-silicate glasses (GSG) in the process of oxidation of the Ge-doped nanostructured polycrystalline silicon films (NSF PCS) has been investigated. The dependences of heating effects in the process of linear heating of grinded GSG are shown.

Published in:

Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference

Date of Conference:

14-18 Sept. 2009