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Characterization of CuInSe2 thin films prepared by ion-beam sputtering

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5 Author(s)
Zhuang-hao Zheng ; Inst. of Thin Film Phys. & Applic., Shenzhen Univ., Shenzhen, China ; Fan, Ping ; Dong-ping Zhang ; Xing-Min Cai
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CuInSe2 (CIS) thin films were prepared by ion-beam sputtering at different substrate temperatures. The films prepared at room temperature were annealed at different temperatures. Films annealed at appropriate temperatures are dense, uniform and of single-phase.

Published in:

Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on

Date of Conference:

30-3 Aug. 2009