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Influence of deposition temperature on the properties of Al2O3 thin films

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3 Author(s)
Meiqiong Zhan ; Shanghai Second Polytech. Univ., Shanghai, China ; Luo Wu ; Shao, Jianda

Al2O3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd:YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.

Published in:

Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on

Date of Conference:

30-3 Aug. 2009