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A Parylene MEMS Electrothermal Valve

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5 Author(s)
Po-Ying Li ; Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA ; Givrad, T.K. ; Holschneider, D.P. ; Maarek, J.-M.I.
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The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.

Published in:

Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 6 )