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Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control

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1 Author(s)
Fleming, Andrew J. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia

In this study, the actuator load force of a nanopositioning stage is utilized as a feedback variable to achieve both tracking and damping. The transfer function from the applied actuator voltage to the measured load force exhibits a zero-pole ordering that greatly simplifies the design and implementation of a tracking and damping controller. Exceptional tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in the closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with a force-feedback control). Gain margin is simultaneously improved from 5 dB to infinity.

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:15 ,  Issue: 3 )