Cart (Loading....) | Create Account
Close category search window
 

Fiber-Optic Laser Doppler Vibrometer to Dynamically Measure MEMS Actuator With In-Plane Motion

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Man-Geun Kim ; Dept. of Mechatron., Gwangju Inst. of Sci. & Technol., Gwangju, South Korea ; Kyoungwoo Jo ; Kwon, Hyuk-Sang ; Wongun Jang
more authors

An on-axis laser Doppler vibrometer (LDV), where the direction of the incident beam is the same as the direction of the movement of the actuator, intrinsically offers an accurate dynamic measurement, although it cannot be currently applied to MEMS actuators with in-plane motion due to its limited access to the sidewall. The only currently available method is an off-axis LDV, which still shows serious measurement errors, depending on the target surface pattern of the device. In this paper, an on-axis fiber-optic LDV (FLDV) with a 45deg-angled optical fiber is proposed as a means of measuring the in-plane motion of a MEMS actuator. The device demonstrated displacements in the range between 6.5 mum at 2 Hz and 11.0 mum at 280 Hz, corresponding to the minimum and maximum velocities of 81.6 mum/s and 19.3 mm/s, respectively. The measurement capability of the proposed FLDV is then confirmed to cover the movement of most MEMS actuators such that it can greatly enhance the flexibility of dynamic measurements in MEMS actuators.

Published in:

Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 6 )

Date of Publication:

Dec. 2009

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.