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Capacitive Pressure Sensor With Very Large Dynamic Range

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2 Author(s)
Bakhoum, E.G. ; Dept. of Electr. & Comput. Eng., Univ. of West Florida, Pensacola, FL, USA ; Cheng, M.H.M.

A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.

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Components and Packaging Technologies, IEEE Transactions on  (Volume:33 ,  Issue: 1 )