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MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment

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8 Author(s)
O. Ducloux ; LIMMS/CNRS-IIS (UMI 2820), The University of Tokyo, JAPAN ; J. W. Park ; N. Tiercelin ; P. Pernod
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This paper presents a novel type of remotely actuated, chemical or bio-sensor based on a MEMS resonator actuated by a multilayered (TbCo/FeCo) x25 nanostructured magnetostrictive film in liquid environment. The active film is polarized in order to induce spin reorientation transition, yielding giant sensitivity to a dynamical actuation magnetic field. Moreover, the resonator is placed at the air/liquid interface in order to increase its quality factor. Sensing results in different viscosity solutions are presented. The possibility to use such a device for the fast determination of cellular density is also demonstrated.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009