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Large stroke high force pneumatic actuators fabricated by SU-8 micromachining

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4 Author(s)
Ceyssens, F. ; Dept. ESAT-MICAS, KULeuven, Leuven, Belgium ; De Volder, M. ; Reynaerts, D. ; Puers, R.

Applications where a microsystem has to interface with the outside world are often face the rather small force output or stroke that a typical microfabricated actuator can generate. However, microscale piston-cylinder pneumatic or hydraulic actuators offer a significant improvement of the stroke and force output of microactuators. For the first time, a process is presented that enables batch fabrication of such actuators by a lithographic process based on SU-8 photoepoxy. The total volume of the smallest of these actuators is a mere ~1 mm3. The maximum force obtained is 37 mN for an applied pressure of 10 bars. The actuator stroke is 1.1 mm.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009