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Tunable optical bandpass filter with high-quality vertical mirrors microassembled on movable MEMS platforms

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4 Author(s)
Jeong, J.W. ; Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA ; Jung, I.W. ; Baney, D.M. ; Solgaard, O.

In this paper we introduce a tunable MEMS optical bandpass filter with large vertical mirrors (450 mum tall) micro-assembled on MEMS actuators based on MEMS platform technology. The fabrication process requires only one mask, and the platform technology allows a very compact chip size with high optical quality vertical mirrors. In addition, electrostatic combdrive actuators enable precise, continuous, and independent tuning of both the center wavelength and optical passband. The 1-dB bandwidth can be continuously varied from 0.1 nm to 1.3 nm. The center wavelength can be precisely controlled over a large spectral range by either actuating the movable blocking mirrors, or by rotating the grating for coarse tuning.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009