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Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor

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4 Author(s)
Goetz, M. ; Inst. fur Mikro- und Informationstech. (HSG-IMIT), Hahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany ; Messner, S. ; Ashauer, M. ; Zengerle, R.

We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0-10 mL/min and with a back pressure of 0-75 kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1 ms response time.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009

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