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A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighing

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6 Author(s)
X. Yang ; MEMS Lab., Department of Precision Instruments & Mechanology, Tsinghua University, Beijing, China ; Z. Y. Zhou ; F. Z. Zheng ; M. Zhang
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A single-walled carbon-nanotube-array-based (SWCNT) strain sensor was proposed and its fabrication technique was presented, which afforded more simple process than individual SWCNT-based sensor. A novel selective treatment of strain-based electrical breakdown was utilized to leave the SGS-SWCNTs with high gauge factor in the array. The SWCNT-array strain sensor were used for weighing experiment and the results showed that the sensor's output was basically linear. It also showed that the sensor had relatively higher sensitivity (GF ap 20) and lower power consumption (tens of nanoWatts) than metal strain-gauge, which had potential applications in high sensitivity strain, weighing or pressure sensors.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009