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Improved performance of large stroke comb-drive actuators by using a stepped finger shape

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5 Author(s)
J. B. C. Engelen ; MESA+ and IMPACT Research Institutes, University of Twente, Enschede, The Netherlands ; M. A. Lantz ; H. E. Rothuizen ; L. Abelmann
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In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009