By Topic

Novel theoretical design and fabrication test of biomimicry directional microphone

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Shigeru Ando ; Dept. Information Physics and Computing, University of Tokyo, Japan ; Toru Kurihara ; Kentaro Watanabe ; Yoshiki Yamanishi
more authors

Micromachined directional microphones (sound source localization sensor) mimicking an auditory organ of Ormia Ochracea have been intensively studied based on center-supported, marginally free 1-D or 2-D diaphragm structures. Based on an exact mathematical formulation, a Gaussian weight function on the diaphragm is shown to be inevitable in the transduction of 1st and 2nd moments. An analysis was performed to obtain the weight distribution assuming an arbitrary thickness distribution of a shell-structured diaphragm. The best result was a marginally-supported face-to-face cantilever structure. We fabricated this structure using SOI wafer and RIE. The experimental results show a strong dependence of the vibration pattern on both zenith and azimuth angles, and a greatly enhanced sensitivity to inclined sound pressure.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009