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Pyroelectric IR sensor array using lead-free pyroelectric NBT thin film on epitaxial γ-Al2O3/si(100) substrates

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6 Author(s)
Sugai, T. ; Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan ; Kikuchi, K. ; Yoshita, R. ; Akai, D.
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In this work, we fabricated lead-free pyroelectric infrared (IR) sensor array on epitaxial gamma-Al2O3/Si(100) substrates with signal processing circuit using pyroelectric (Na0.5Bi0.5)TiO3 (NBT) thin film deposited by chemical solution deposition (CSD), and we also investigated feasibility of NBT thin film in Si processes.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009

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