IEEE.org| IEEE Xplore Digital Library| IEEE Standards| IEEE Spectrum| More Sites

Cart (Loading....) | Create Account | 

Close category search window
Author Searchbeta |  Advanced Search  |  Preferences |  Search Tips  |  More Search Options  
 
Browse Conference Publications > Solid-State Sensors, Actuator ... Help

Pyroelectric IR sensor array using lead-free pyroelectric NBT thin film on epitaxial γ-Al2O3/si(100) substrates

Full Text Sign-In or Purchase

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing! close button
puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Sugai, T. ; Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan ; Kikuchi, K. ; Yoshita, R. ; Akai, D.
more authors

In this work, we fabricated lead-free pyroelectric infrared (IR) sensor array on epitaxial gamma-Al2O3/Si(100) substrates with signal processing circuit using pyroelectric (Na0.5Bi0.5)TiO3 (NBT) thin film deposited by chemical solution deposition (CSD), and we also investigated feasibility of NBT thin film in Si processes.

Published in:
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference: 21-25 June 2009

Page(s):
1971 - 1974
E-ISBN :
978-1-4244-4193-8
Print ISBN:
978-1-4244-4190-7
INSPEC Accession Number:
10917001
Conference Location :
Denver, CO
Digital Object Identifier :
10.1109/SENSOR.2009.5285677
Product Type:
Conference Publications

IEEE Account

Purchase Details

Profile Information

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.