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Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

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5 Author(s)
K. E. Wojciechowski ; Sandia National Laboratories, Albuquerque, NM, USA ; R. H. Olsson ; M. R. Tuck ; E. Roherty-Osmun
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Aluminum nitride (AlN) contour mode resonators have been of interest because of their high quality factor, low impedance, large number of frequencies on a single chip and compatibility with CMOS processes. While AlN low insertion loss filters and oscillators have been demonstrated, CMOS integration has yet to be accomplished. This work represents the first time fully-released contour mode AlN microresonators have been integrated with CMOS circuitry to obtain completely monolithic frequency references.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009