By Topic

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The following topics are dealt with: actuators; biosensors and biomicrosystems; chemical microsensor and microsystems; sensor materials, fabrication and packaging technology; mechanical/physical sensors and systems; medical microsystems; microfluidics; nanoscale materials and fabrication technology, devices and systems; optical MEMS; power MEMS; RF MEMS, resonators and oscillators; cell manipulation and analysis; and inertial sensors.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009