By Topic

A bistable SMA microactuator with large work output

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
J. Barth ; Forschungszentrum Karlsruhe GmbH, IMT, Germany ; B. Krevet ; M. Kohl

The design, fabrication and performance of a bistable shape memory alloy (SMA) microactuator is presented comprising large contact force and stroke at low power consumption. The switching mechanism consists of two antagonistically coupled SMA microbridges. The end positions are maintained by ferromagnetic attraction using integrated soft-and hard-magnetic structures with optimized geometry. The problem of 3D integration of SMA and magnetic components on the wafer scale is solved by introducing a new two-step SMA transfer bonding process and the technology of electroplating of soft-magnetic layers directly on SMA layers. Demonstrators of 7times7times4 mm3 overall size show contact forces of 30 mN and a stroke of 84 mum.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009