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Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid

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2 Author(s)
Sai Sumanth Pottigari ; University of Missouri - Columbia, U.S.A. ; Jae Wan Kwon

This paper describes a novel design of a film bulk acoustic resonator (FBAR) without significant reduction of Q factor in liquid environments. The new design employs a vacuum gap to prevent acoustic energy loss in liquid. The Q factor was measured to be about 153 in the air and 140 in the water. We found that the Q factor is reduced only 9% in water, while the Q factor of a normal FBAR in the water is drastically decreased down to about 20 (more than 85% reduction). The device exhibited excellent liquid mass sensing capability due to the Q factor in liquid kept as high as in the air.

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TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009