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A monolithic integrated micromachined piezoresistive flow sensor

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5 Author(s)
Dan Li ; Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China ; Zhao, T. ; Qian, L. ; Yang, Z.C.
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In this paper, a monolithic integrated piezoresistive flow sensor is presented, which was fabricated with an intermediate CMOS MEMS process compatible with pressure sensors. Four symmetrically arranged silicon diaphragms with piezoresistors on them are used to sense the drag force induced by the input gas flow. Signal conditioning CMOS circuit with temperature compensation was designed and tested, the resulting temperature coefficient is 6%FS/100degC. The integrated flow sensor was packaged and tested, and the resolution is less than 0.1 L/min with range of 0.1-5 L/min.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Date of Conference:

21-25 June 2009

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