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Energy loss in MEMS resonators and the impact on inertial and RF devices

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6 Author(s)
Marc Weinberg ; Charles Stark Draper Laboratory, Cambridge, MA, USA ; Rob Candler ; Saurabh Chandorkar ; Jonathan Varsanik
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In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.

Published in:

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Date of Conference:

21-25 June 2009