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Fabrication and Demonstration of Electrowetting Liquid Lens Arrays

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4 Author(s)
Smith, N.R. ; Dept. of Electr. & Comput. Eng., Univ. of Cincinnati, Cincinnati, OH, USA ; Linlin Hou ; Jinlin Zhang ; Heikenfeld, J.

Reported is the fabrication and demonstration of an array of >12 000 switchable liquid microlenses, each ~300 mum in diameter and switchable through plano-concave to plano-convex. Electrowetting is used to modulate the contact angle of an aqueous/oil liquid system over a range of 100deg, resulting in a switchable dioptric range of -360 m-1 to 230 m-1. Compared to previous reports of single 2-6 mm electrowetting lenses, the fabrication process reported herein reduces the individual lenslet size by ~10times. To dose liquids into large arrays of these small liquid lenslets, a scalable self-assembled dosing process was developed. The completed liquid lens array has a fill factor of 50% which can be extended to >80%.

Published in:

Display Technology, Journal of  (Volume:5 ,  Issue: 11 )