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The Teradyne model J750 System on Chip (SOC) test system is one of the most important Integrated Circuit(IC) test systems and used widely in the semiconductor manufacture. The J750 is a 512 or 1024 channel test system, contained entirely in the test head. It is difficult to find if the accuracy of J750 is controlled during the maximum permissible error, since the function and the structure of J750 is complicated and the specification of J750 includes many parameters. In this paper, a calibration method of J750 SOC test system described here resolved the traceability problem of J750, and it is also a recommended calibration method of other SOC test system, such as Teradyne Flex, Verigy 93K, Credence Sapphire, etc.