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Formation and suppression of a newly discovered secondary EOS event in HBM test systems

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11 Author(s)
Meuse, T. ; Thermo Electron Corp., Lowell, MA, USA ; Ting, Larry ; Schichl, J. ; Barrett, R.
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A previously undetected trailing pulse from HBM testers was found to create unexpected gate oxide failures on new technologies. This secondary pulse, which is EOS in nature, is caused by the discharge relay and the parasitics of the charge circuit. This paper investigates this critical phenomenon and establishes the tester improvements to safely suppress the trailing pulse effects.

Published in:

Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.

Date of Conference:

19-23 Sept. 2004