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Scale-Length Assessment of the Trigate Bulk MOSFET Design

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2 Author(s)
Xin Sun ; Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA, USA ; Tsu-Jae King Liu

The scale length for trigate and planar ground-plane bulk MOSFETs is derived, and its sensitivity to device design parameters is investigated. The results indicate that the trigate bulk MOSFET is a more scalable design as compared with the planar ground-plane bulk MOSFET and the double-gate SOI MOSFET.

Published in:

Electron Devices, IEEE Transactions on  (Volume:56 ,  Issue: 11 )