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Welcome to the 22nd International Vacuum Nanoelectronics Conference (IVNC2009) at Act City Hamamatsu, Congress Center, Hamamatsu, which is located at almost center of Japan and has produced many world??renowned companies, such as Suzuki, Honda, Yamaha, Kawai, Roland and Hamamatsu Photonics as a ??City of Manufacturing?? and a ??City of Industry??. IVNC2009 in Hamamatsu continues the main theme of IVNC. After informal welcome on Monday late afternoon, 20th July 2009, we start sessions on Tuesday morning, 21st July 2009 and finish on Friday afternoon, 24th July 2009. In addition to conventional sessions, a tutorial session is held on Monday afternoon, 20th July 2009. The sessions are focused on the following areas: FEDs, Fundamentals, Materials, Fabrication and Applications. This proceeding contains extended abstracts to be presented at 22nd IVNC. This includes 1 keynote and 2 special lectures, 15 invited talks, 32 oral presentations and 117 poster presentations.