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Study of the synthesis of WO3 nano-structured arrays by tungsten hot filament chemical vapor deposition method and their field emission properties

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4 Author(s)
Lu, Di ; Grad. Sch. of Sci. & Technol., Shizuoka Univ., Hamamatsu, Japan ; Bo Liang ; Ogino, Akihisa ; Nagatsu, Masaaki

Here in this work, the hot filament chemical vapor deposition method is adopted, with an extra heating stage is employed as well, to control the substrate temperature precisely. Since this method, different kinds of WO3 nano-structure arrays were prepared, and their FE properties were studied.

Published in:

Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International

Date of Conference:

20-24 July 2009

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