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Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition

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4 Author(s)
Murakami, K. ; Center for Quantum Sci. & Technol. under Extreme Conditions, Osaka Univ., Toyonaka, Japan ; Matsuo, T. ; Wakaya, F. ; Takai, M.

The development of a coherent-field emitter for electron-wave interferences and its possible application have been investigated in our research. So far, electron-wave interferences induced by electrons emitted from a Pt field emitter fabricated by electron-beam-induced deposition (EBID) were reported. However, the field emission properties and electron-emission patterns of Pt field emitters fabricated by focused-ion beam (FIB)-induced deposition (FIBID) have not been characterized. The resistivity of a Pt nanowire fabricated by EBID was quite high and decreases by three to four orders of magnitude after annealing at 400deg C. On the other hand, the resistivity of Pt nanowire deposited by FIB was very low even without annealing. The Pt field emitter fabricated by FIBID might be, therefore, more suited to the coherent-field emitter. In this study, the characteristics of Pt field emitters fabricated by FIBID and their electron-emission patterns of electron-wave interference were investigated.

Published in:

Vacuum Nanoelectronics Conference, 2009. IVNC 2009. 22nd International

Date of Conference:

20-24 July 2009