By Topic

Recent advances in laser assisted polymer intermediate layer bonding for MEMS packaging

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Changhai Wang ; Sch. of Eng. & Phys. Sci., Heriot Watt Univ., Edinburgh, UK ; Jun Zeng ; Yufei Liu

This paper presents the recent advances in the development of a laser assisted fast polymer bonding method for electronic packaging applications. In this method a high power diode laser is used to cure a polymer adhesive material to bond substrates together. A unique beam forming method using custom designed optical phase plate elements was developed to transform a fiber delivered laser beam into top-hat and frame shaped beam profiles for energy efficient polymer bonding for electronics manufacturing. In addition it has been found that the frame shaped beam profile can produce a desirable temperature distribution for MEMS packaging in which the surface temperature at the center of the substrate is lower by ~50degC than the packaging temperature (~300degC) when bonding a glass cap to a silicon substrate. An accurate temperature monitoring method using an embedded thin film microsensor array has been developed and has been used successfully for process monitoring. Defect-free fast bonding (~10 seconds) of transparent cap (glass) and non-transparent cap (silicon) to a silicon chip has been demonstrated. This work illustrates the potential of the diode laser based photonic technology for advanced MEMS packaging and electronics manufacturing.

Published in:

Electronic Packaging Technology & High Density Packaging, 2009. ICEPT-HDP '09. International Conference on

Date of Conference:

10-13 Aug. 2009