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The production of microwave integrated circuits by laser machining

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1 Author(s)

This paper discusses laser machining as an alternative to photolithography for the production of m.i.c.s. A complete equipment is described comprising a laser with computer-controlled XY table moving a prepared substrate through the laser beam. The procedure to transfer the design sketch of a microwave circuit into a finished substrate is described together with some results.

Published in:

Radio and Electronic Engineer  (Volume:48 ,  Issue: 1.2 )