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High quality-factor inductors integrated on Si multichip modules

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10 Author(s)
Zu, L. ; AT&T Bell Labs., Murray Hill, NJ, USA ; Yicheng Lu ; Frye, R.C. ; Lau, M.Y.
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We report high quality (Q) factor inductors fabricated on a high-resistivity (2000 Ω-cm) Si substrate with MCM technology. Q-factors of 30-40 were achieved for inductors of a few nH at 1 GHz

Published in:

Electrical Performance of Electronic Packaging, 1995

Date of Conference:

2-4 Oct 1995

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