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Design and implementation of a 525 mm2 CMOS digital micromirror device (DMD) display chip

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4 Author(s)
Chiu, E.H. ; Texas Instrum. Inc., USA ; Can Tran ; Honzawa, T. ; Numaga, S.

This paper describes a new type of 1280×1024 Digital Micromirror Device (DMD) with 50 MHz serial I/O ports. The DMD uses a unique shadow memory and pixel multiplexing scheme to realize a high-definition television (HDTV) single-chip integrated circuit display device. The project developed defect-tolerant techniques based on memory cell duplication with address decoding to improve the fabrication yield of large-chip-size devices. This DMD chip is fabricated using 0.8 μm single polysilicon and six-level metal CMOS process technology. A unique and optimized pixel with a pixel pitch of 17 μm is obtained as a result of the 25×21 mm2 compact chip design

Published in:

VLSI Technology, Systems, and Applications, 1995. Proceedings of Technical Papers. 1995 International Symposium on

Date of Conference:

31 May-2 Jun 1995