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2 Author(s)
P. Pei ; SEMATECH, Austin, TX, USA ; H. R. Kerby

The technology development needed to support continuous improvement in ESH characteristics of semiconductor manufacturing facilities is changing as strategies for source reduction, incident prevention and more refined schemes for assessing ESH improvement emerge. This paper briefly characterizes the changes taking place in ESH management structure and focuses on examples of technology development underway to satisfy the new model of ESH execution reflected in this structure change

Published in:

Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on

Date of Conference:

17-19 Sep 1995