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Depth-profiling of elastic inhomogeneities in transparent nanoporous low-k materials by picosecond ultrasonic interferometry

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6 Author(s)
Mechri, C. ; LPEC, UMR-CNRS 6087, Université du Maine, av. O. Messiaen, 72085 Le Mans, France ; Ruello, P. ; Breteau, J.-M. ; Baklanov, M.R.
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We achieve depth-profiling of the elasticity of a thin transparent film of a nanoporous low-k material using picosecond acoustic interferometry. The variation in the material properties with depth is extracted from time-resolved femtosecond optical reflectivity measurements. More than 40% of the variation in the longitudinal elastic modulus between the front and the back surfaces of an 800 nm thick nanoporous layer is mapped with a 40 nm spatial resolution. We attribute this variation to the spatially inhomogeneous UV curing of the film during fabrication.

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Applied Physics Letters  (Volume:95 ,  Issue: 9 )