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Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator

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6 Author(s)
Claes, T. ; Photonics Res. Group, Ghent Univ. - IMEC, Ghent, Belgium ; Molera, J.G. ; De Vos, K. ; Schachtb, E.
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We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mum times 10 mum, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2middot10-5 RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.

Published in:

Photonics Journal, IEEE  (Volume:1 ,  Issue: 3 )