Cart (Loading....) | Create Account
Close category search window
 

Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Tanaka, Hiro ; Department of Mechanical Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan ; Shinkai, Masaki ; Shibutani, Yoji ; Kogo, Yasuo

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.3212912 

Nanopillars with nanosized diameter and microsized length can be constructed by chemical vapor deposition using a focused ion beam. For a pillar consisting of an outer amorphous carbon ring and an inner gallium core, we performed the bending tests using the unique double-cantilever specimen joining two pillars together by an electron-beam deposition technique in a scanning electron microscope. The precise load-deflection curves indicate that the pillars have a nonlinear softening region after the linear response as the diameter increases. However, pillars finally become extremely hardened at the large deformation. Thus, the pillar intrinsically possesses much more flexibility and stable deflection for bending than expected, in contrast to tensile deformation. The bending rigidity obtained by the infinitesimal deflection corresponds well to that by the resonance vibration tests reported so far. It also certifies that the proposed double-cantilever bending method can maintain high accuracy for the nanoscaled materials testing.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 5 )

Date of Publication:

Sep 2009

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.