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Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing

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4 Author(s)
Tanaka, Hiro ; Department of Mechanical Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan ; Shinkai, Masaki ; Shibutani, Yoji ; Kogo, Yasuo

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Nanopillars with nanosized diameter and microsized length can be constructed by chemical vapor deposition using a focused ion beam. For a pillar consisting of an outer amorphous carbon ring and an inner gallium core, we performed the bending tests using the unique double-cantilever specimen joining two pillars together by an electron-beam deposition technique in a scanning electron microscope. The precise load-deflection curves indicate that the pillars have a nonlinear softening region after the linear response as the diameter increases. However, pillars finally become extremely hardened at the large deformation. Thus, the pillar intrinsically possesses much more flexibility and stable deflection for bending than expected, in contrast to tensile deformation. The bending rigidity obtained by the infinitesimal deflection corresponds well to that by the resonance vibration tests reported so far. It also certifies that the proposed double-cantilever bending method can maintain high accuracy for the nanoscaled materials testing.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 5 )

Date of Publication:

Sep 2009

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