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Highly Sensitive Porous Silicon Membrane Waveguide Sensor Using Ultra-High Order Mode

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1 Author(s)
Guoguang Rong ; Sch. of Microelectron., Shanghai Jiao Tong Univ., Shanghai, China

This work proposes a label-free porous silicon membrane waveguide biosensor with very high sensitivity due to the utilization of an ultra-high order mode for sensing. Its sensitivity toward refractive index perturbation is simulated and shown to be superior to that of a porous silicon membrane waveguide utilizing a low order mode. The proposed sensor structure is especially suitable for biosensing applications due to its large surface area, oscillating wave interaction with biomolecules, free-space coupling for ease of sensor array integration, and horizontal pore orientation compatible with microfluidics.

Published in:

2009 Symposium on Photonics and Optoelectronics

Date of Conference:

14-16 Aug. 2009