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Enhanced Light Extraction in Wafer-Bonded AlGaInP-Based Light-Emitting Diodes via Micro- and Nanoscale Surface Textured

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9 Author(s)
Yea-Chen Lee ; Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Hao-Chung Kuo ; Bo-Siao Cheng ; Chia-En Lee
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AlGaInP-based metal-bonding light-emitting diodes (LEDs) with micro- and nanoscale textured surface were investigated. The device surface with microbowls and nanorods were formed by a chemical wet-etching and dry-etching technique for enhancing light-extraction purpose. The luminous intensity could be enhanced 65.8% under 20-mA current injection as compared with the plane surface LEDs. The maximum wall-plug efficiency was achieved 14.1% at 7.5-mA operation.

Published in:

IEEE Electron Device Letters  (Volume:30 ,  Issue: 10 )