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Model research and features simplification for scheduling of wafer fabrication system

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3 Author(s)
Ying Wang ; Department of Automation, Xiamen University, China, 361005 ; Zhixian Lin ; Maoqing Li

Scheduling of wafer fabrication system with machine failures and repair time is studied by Neuro-dynmamic programming in this paper. States set and scheduling set are constructed, state transition probability is deduced and dynamic programming model with closed-release policy is analyzed. Key features are derived by simplification of non-bottleneck stations, and then scheduling policy can be obtained by approximation of optimization cost function with simulation. TRC model of HP is scheduled to illustrate the validity of the method.

Published in:

Computer Science & Education, 2009. ICCSE '09. 4th International Conference on

Date of Conference:

25-28 July 2009