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Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching

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3 Author(s)
T. Takaoka ; Department of Electric, Electronic, and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-Oka, Suita 565-0871, Japan ; M. Fujimura ; T. Suhara

A simple fabrication method of adhered LiNbO3 ridge waveguides by accelerated etching of the proton-exchanged region is proposed and demonstrated. The waveguides were fabricated and tested at 1.55 mum wavelength. Strongly confined guided modes were obtained. The waveguides are suitable for efficient nonlinear-optic wavelength conversion devices.

Published in:

Electronics Letters  (Volume:45 ,  Issue: 18 )