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Phase tunable holographic lithography using a single optical element

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6 Author(s)
Di Xu ; Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA ; Chen, K. ; Harb, A. ; Rodriguez, Daniel
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This paper presents the holographic fabrication of three-dimensional photonic crystal templates by forming a five beam interference pattern using a top-cut prism. The interconnecting of the multi-layer structures was controlled by phase-tuning one interfering beam.

Published in:
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on

Date of Conference: 2-4 June 2009

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