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High resolution imaging of optical modes in silicon microdisk cavities based on near-field perturbation

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4 Author(s)
Ali Asghar Eftekhar ; School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, 30332, USA ; Mohammad Soltani ; Siva Yegnanarayanan ; Ali Adibi

We demonstrate high resolution near-field imaging of the optical modes profile in high Q silicon microdisks. A spatial resolution of ~20 nm is obtained by characterizing the perturbative effects of a scanning AFM tip on the microdisk transmission.

Published in:

2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference

Date of Conference:

2-4 June 2009