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Cavity-Enhanced IR Absorption in Planar Chalcogenide Glass Microdisk Resonators: Experiment and Analysis

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6 Author(s)
Juejun Hu ; Massachusetts Inst. of Technol., Cambridge, MA, USA ; Carlie, Nathan ; Petit, Laeticia ; Agarwal, A.
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Planar microdisk optical resonators fabricated from Ge23Sb7S70 chalcogenide glass on a silicon substrate are applied for cavity-enhanced spectroscopic measurement of chemical molecular absorption fingerprint. A 0.02 cm- 1 detection limit for these devices is demonstrated. This detection limit represents a threefold improvement as compared to a straight waveguide sensor, while the physical device length is reduced by 40-fold. The reduction in device footprint with enhanced sensitivity makes the structure attractive for ldquosensor-on-a-chiprdquo device applications. We also present a design optimization approach for cavity-enhanced IR absorption spectroscopy using traveling-wave resonators, which indicates that further performance improvement can be achieved in optimally coupled, low-loss resonant cavities.

Published in:

Lightwave Technology, Journal of  (Volume:27 ,  Issue: 23 )